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Home Application Application Sheets
Subject Gap Sensor Application example: Measurement of wafer thickness
Name Admin
Date 2020.06.15
Hit 468

GAP-SENSOR is used to measure the thickness of the silicon
wafer prepared by thinly slicing the silicon ingot.
The sensor detects the clearance between the upper and lower
level base plates to calculate the wafer thickness.
While 05 coil type sensors are mainly used, 09 type products are
occasionally used also.
The sensors are embedded into the upper base plate.
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