Subject | Gap Sensor Application example: Measurement of wafer thickness |
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Name | Admin |
Date | 2020.06.15 |
Hit | 670 |
GAP-SENSOR is used to measure the thickness of the silicon wafer prepared by thinly slicing the silicon ingot. The sensor detects the clearance between the upper and lower level base plates to calculate the wafer thickness. While 05 coil type sensors are mainly used, 09 type products are occasionally used also. The sensors are embedded into the upper base plate. |
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